Academic Areas: Micro/Nano optical measuring technologies, instruments, and sensors
Chen Xiuguo is now a lecturer in the School of Mechanical Science and Engineering at Huazhong University of Science and Technology, Wuhan, China. His current research includes the theory, instrumentation, and application of optical measuring techniques for nanoscale characterization by exploring the information in the light, including intensity, frequency/wavelength, phase, and polarization.
1. X. Chen, H. Gu, H. Jiang, C. Zhang, and S. Liu, “Robust overlay metrology with differential Mueller matrix calculus,” Opt. Express 25(8), 8491-9510 (2017).
2. X. Chen, W. Du, K. Yuan, J. Chen, H. Jiang, C. Zhang, and S. Liu, “Development of a spectroscopic Mueller matrix imaging ellipsometer for nanostructure metrology,” Rev. Sci. Instrum. 87, 053707 (2016).
3. X. Chen, Y. Shi, H. Jiang, C. Zhang, and S. Liu, “Nondestructive analysis of lithographic patterns with natural line edge roughness from Mueller matrix ellipsometric data,” Appl. Surf. Sci. 388, 524-530 (2016).
4. X. Chen, H. Jiang, C. Zhang, and S. Liu, “Towards understanding the detection of profile asymmetry from Mueller matrix differential decomposition,” J. Appl. Phys. 118(22), 225308 (2015).
5. X. Chen, S. Liu, C. Zhang, H. Jiang, Z. Ma, T. Sun, and Z. Xu, “Accurate characterization of nanoimprinted resist patterns using Mueller matrix ellipsometry,” Opt. Express 22(12), 15165-15177 (2014).
6. X. Chen, C. Zhang, S. Liu, H. Jiang, Z. Ma, and Z. Xu, “Mueller matrix ellipsometric detection of profile asymmetry in nanoimprinted grating structures,” J. Appl. Phys. 116(19), 194305 (2014).
7. X. Chen, S. Liu, H. Gu, and C. Zhang, “Formulation of error propagation and estimation in grating reconstruction by a dual-rotating compensator Mueller matrix polarimeter,” Thin Solid Films 571, 653-659 (2014).
8. X. Chen, C. Zhang, and S. Liu, “Depolarization effects from nanoimprinted grating structures as measured by Mueller matrix polarimetry,” Appl. Phys. Lett. 103(15), 151605 (2013).
9. X. Chen, S. Liu, C. Zhang, and H. Jiang, “Improved measurement accuracy in optical scatterometry using correction-based library search,” Appl. Opt. 52(27), 6727-6734 (2013).
1. JSPS Postdoctoral Fellowship for Overseas Researchers
2. Excellent Postdoctoral Fellow of Huazhong University of Science and Technology
3. Hiwin Doctoral Dissertation Award – Excellence Award
4. Outstanding Graduate Award of Huazhong University of Science and Technology
5. Outstanding Undergraduate Award of Shandong Province