Phone: 86-27-87558744


Academic Areas: (check"Brief introduction")

Prof. Rong Chen received her Doctoral and Master degrees from Stanford University and bachelor degree from University of Science and Technology of China (USTC). She joined school of mechanical science and engineering, Huazhong University of Science and Technology in 2011. Prior to that, she was a senior research scientist in Intel Labs and Applied Materials, Inc., Santa Clara, USA performing research and development in VLSI process and related equipment development. She is the recipient of“The Recruitment Program of Global Young Experts” of The Organization Department of the Central Committee of the CPC, “New Century Excellent Talents in University” of The Ministry of Education, the Simon Karecki award of USA Semiconductor Research Association, the Texas Instruments Graduate Woman’s Fellowship for Leadership in Microelectronics, and so on.

Prof Chen’s research is focused on the fabrication, design and properties of ultrathin films and nanostructures, and applying to a range of problems in sustainable energy and environment, semiconductor processing, flexible displays, MEMS/NEMS, and nanotechnology. These new interdisciplinary fields in nanoscience and nanotechnology supersede the more traditional disciplines and demand new paradigms for collaboration.

Academic Areas:

Miniaturization to the nanometer scale is an important trend in science and technology. The science and engineering to design and nano-scale materials and devices to address emerging challenges in future electronics and energy storage devices are created many exciting opportunities for research. These new interdisciplinary areas in nanoscience and nanotechnology supersede the more traditional disciplines and demand new paradigms for collaboration.

Specific research areas include: 1)Developing highly engineered inorganic nanostructures with well-defined chemical composition, physical dimension and structure, and assembly of them into increasingly complex architecture 2)Investigating fundamental properties of such materials and exploring them as functional nano-systems for applications in electronics, optoelectronics, and sustainable energy 3)Fundamental understanding of such materials properties through the combination of experimental and theoretical modeling, and provide means of rational design of experiments 4)Design equipment apparatus to achieve the above fabrication goals based on different applications and their requirements.

Academic Degrees

2001.06–2006.06 Stanford University Ph.D. in Physical Chemistry

2004.03–2005.09 Stanford University M.S. in Electrical Engineering

1996.09–2001.06 University of Science and Technology of China B.S. in Polymer Science and Engineering

Professional Experience

2011.08-present Dept. of Mechanical Science and Engineering, Huazhong university of Science and Technology , Huazhong Professor

2015.10-present Dept. of Optical and Engineering, Huazhong university of Science and Technology

2012.05-present Chinese Academy of Sciences Ningbo institute of material technology and engineering, Adjunct Professor

2007.07-2011.08 Intel Corp., Senior Research Scientist

2009.11-2011.08 Intel Corp. external research office, Academic Consultant

2006.07-2007.07 Applied Materials Inc., Senior Researcher

Selected Publications

  1. Kun Cao, Qianqian Zhu, Bin Shan*, Rong Chen* “Controlled Synthesis of Pd/Pt Core Shell Nanoparticles Using Area-selective Atomic Layer Deposition” Sci. Rep. 2015, 5, 8470.

  2. Bin Huang, Wenjuan Yang, Yanwei Wen, Bin Shan*, Rong Chen* “Co3O4 Modified TiO2 Nanotube Arrays via Atomic Layer Deposition for Improved Visible-Light Photoelectrochemical Performance” ACS Appl. Mater. Inter. 2015, 7 (1), 422.

  3. Kun Cao, Xiao Liu, Qianqian Zhu, Bin Shan*, Rong Chen* “Atomically controllable Pd@Pt core shell nanoparticles towards PROX's reactions modulated by Pt shell thickness” ChemCatChem 2016, 8, 326.

  4. Chen-Long Duan, Xiao Liu, Bin Shan, and Rong Chen* “Fluidized bed coupled rotary reactor for nanoparticles coating via atomic layer deposition” Rev. Sci. Instrum. 2015, 86, 075101.

  5. Chen-Long Duan, Zhang Deng, Kun Cao, Hong-Feng Yin, Bin Shan, Rong Chen* “Surface passivation of Fe3O4 nanoparticles with Al2O3 via atomic layer deposition in a rotating fluidized bed reactor” J. Vac. Sci. Technol. A 2016, 34, 04C103.

  6. Wen-jie He, Hai-tao Zhang*, Zhiyong Chen, Bo Chu, Kun Cao, Bin Shan, Rong Chen* “Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor” IEEE Trans. Contr. Sys. Tech. 2015, 23(6), 2408.

  7. Wen-Jie He, Hai-Tao Zhang, Zhiyong Chen, Ji-Long Lin, Kan Tian, Bin Shan, Rong Chen* “Temperature Control for Nano-Scale Films by Spatially-Separated Atomic Layer Deposition based on Generalized Predictive Control” IEEE Trans. Nanotechnol 2015, 14(6), 1094.

  8. Zhang Deng, Wenjie He, Chenlong Duan, Rong Chen*, Bin Shan “Mechanistic modeling study on process optimization and precursor utilization with atmospheric spatial atomic layer deposition” J. Vac. Sci. Technol. A 2016, 34(1), 01A108.

  9. Zhang Deng, Wenjie He, Chenlong Duan, Bin Shan, Rong Chen* “Atomic layer deposition process optimization by computational fluid dynamics” Vacuum 2016, 123, 103.

  10. Bin Huang, Kun Cao, Xiao Liu, Lihua Qian, Bin Shan*, Rong Chen* “Tuning the morphology and composition of ultrathin cobalt oxide film via atomic layer deposition” RSC Adv. 2015, 5, 71816.

  11. Zhengzheng Chen, Xiao Liu, Kyeongjae Cho, Rong Chen*, Bin Shan* “Density Functional Theory Study of the Oxygen Chemistry and NO Oxidation Mechanism on Low-Index Surfaces of SmMn2O5 Mullite” ACS Catal. 2015, 5, 4913.

  12. Stephanie L. Candelaria, Rong Chen, Yoon-Ha Jeong, Guozhong Cao, “Highly porous chemically modified carbon cryogels and their coherent nanocomposites for energy applications”, Energy Environ. Sci. 2012, 5, 5619.

  13. Rong Chen, Zhengzheng Chen, Bo Ma, Xiaohong Hao, Neeti Kapur, Jangsuk Hyun, Kyeongjae Cho, Bin Shan, “CO adsorption on Pt(111) and Pd(111) surfaces: a first-principles based lattice gas Monte-Carlo study”, Comp. Theo. Chem. 2012, 987, 77.

  14. Noureddine Tayebi, Yuegang Zhang, Robert J. Chen, Quan Tran, Rong Chen, Yoshio Nishi, Qing Ma, Valluri Rao, “An ultraclean tip-wear reduction scheme for ultrahigh density scanning probe-based data storage”, ACS Nano 2010, 4 (10), 5713.

    15.  Rong Chen, Stacey F. Bent, “Chemistry for positive pattern transfer by area-selective atomic layer deposition” Adv. Mater. 2006, 18, 1086.

Awards and Honors

2016 Gold award of 44th international innovation exhibition and International Invention Special Award by Thailand National Research Council

2015 Young and middle-aged leading scientists, engineers and innovators” by ministry of science and technology of China

2015 Top cited paper for scientific reports

2013 “Top Ten Youth” @ HUST 2012 Huazhong Scholar

2012 Elected as member of Hubei Province Committee of People's Political Consultative Conference 2011 distinguished experts in Hubei Province

2011 “The Recruitment Program of Global Young Experts” of The Organization Department of the Central Committee of the CPC

2010 Intel Labs CSR Department Award for Innovations

2009 “New Century Excellent Talents in University” of The Ministry of Education in China 2008 Frost & Sullivan North American Technology Innovation Award

2008 AlwaysOn Global 250 Top Private Companies (with Nanochips)

2008 Intel California Technology and Manufacturing Department Award for excellent executions and innovation implementations

2007 Applied Materials Outstanding Achievement of Team Excellence Award

2006 Semiconductor Research Corporation Simon Karecki Award for talented young researcher in the pursuit of innovations in environmental research

2004 The first recipient of the Texas Instruments Graduate Woman’s Fellowship for Leadership in Microelectronics

2003 The Best Poster Award at Flory Conference on Novel Electronic Materials

Courses Taught

Undergraduate Course:《Introduce to nanotechnology》24/32 , 《Nanotechnology in daily life》24/32 

Graduate Course:《Thin film technology》32/32 

Doctoral Course:《Advanced manufacturing engineering》4/64



1. 2013-2017 “rational design and performance optimization of the efficient metal-oxide composite catalyst”, National Basic Research Program of China (2013CB934800) youth program, chief scientist.

2. 2016-2019 “Basic research atomic layer deposition systems for flexible electronics manufacturing space isolation”, National Natural Science Foundation of China (51575217), PI.

3. 2015-2017 “Nanoparticle atomic layer covering key technology and equipment research”, Distinguished young scholars of Natural Science Foundation of Hubei Province (51101064), PI.

4. 2014-2016 “Micro and nano manufacturing & precision measurement”, (IRT13017), Innovation team of the Ministry of Education, leading researcher.

5. 2015-2016 “atomic-scale control of multi-interface catalysts via Atomic Layer Deposition”, state key laboratory of DMET (0225100063), PI.


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