Dr. Rong Chen, Professor with the School of Mechanical Science and Engineering, and by courtesy of School of integrated circuits, school of optical and electronic information, and School of China-EU Institute for clean and renewable energy, Huazhong University of Science and Technology (HUST). Assistant to dean and Associate director of HUST flexible electronics research center.
Prof. Chen obtained her bachelor degree from University of Science and Technology of China (USTC) in 2001 and her Master and PhD degrees from Stanford University in 2006. Before she joined HUST as a full professor in 2011, she was a senior research scientist in Intel Labs and Applied Materials, Inc., Santa Clara, performing R&D in VLSI processes and related equipment development.
Prof Chen’s research focuses on atomic level manufacturing, by understanding surface science, and applying this knowledge to a range of problems in sustainable energy, semiconductor processing, and nanotechnology. Her current research interests include selective atomic layer deposition method, nanoparticles modification, thin film technology for applications in optoelectronics, flexible electronics, catalysis and energy storage, as well as developing ALD apparatus for these emerging applications. Prof Chen is the PI for the key project of national natural science foundation of China, National Basic Research Program of China (973), Innovation team leader of Hubei Province, etc.
Prof. Chen has authored and co-authored over 150 peer-reviewed journal papers and conference proceedings with >4,000 citations on Nat. Comm., Adv Mater, Angew. Chem. Int. Ed, Small, Engineering, Sci. Bullet., IJEM, OEA, etc. She has published three edited books and two book chapters, >70 issued Chinese invention patents and >10 international patents, designated project leader and convenor for ISO/TC 107 WG5 of atomic layer deposition. She has given dozens of invited presentations, lectures and tutorials at international conferences such as IEEE Nano, AVS-ALD. She has served as a committee member of AVS ALD, Asian ALD, and member of EU HERALD. Prof. Chen is a Senior Member of IEEE, life member of ECS, and member of AVS, ACS, etc. She is the Editor for Physica B: condensed matter, corresponding expertise of Engineering, and the Editor Board Member for five scientific journals: JVSTA&B, IJEM, coatings, and scientific reports. She also served as Guest Editor for four journal special issues, Chair or Committee Member for >60 international conferences, Reviewer for >60 prestigious journals including Nat. Catal., Nat. Commun., Adv. Mater., Adv. Funct. Mater., ACS Nano, Small, Chem. Mater., Nanoscale, Engineering, light, APL, J. Appl. Phys., Appl. Surf. Sci., RSI, JVSTA, etc.
Prof. Chen is the recipient of many national and international prestigious awards, including National innovation leader (2019), National overseas high-level young talents (2011), the 3rd Xplorer prize (2021), China Overseas innovation talents contribution award (2016), etc. She is also the recipient of IEEE SEC Distinguished Academic Contribution Award (2020), Geneva international innovation exhibition Special Gold awards (2018), the SRC Simon Karecki (2006), the Texas Instruments Woman’s Fellowship for Leadership in Microelectronics (2005). She has been ranked first for the first prize of Technological invention of Hubei Province (2018), Intellectual Property Award of Hubei Province (2019), CAST “Innovation China” leading technology (2020), winner of the MOST disruptive technology innovation competition (2021), etc.
See more at http://anml.hust.edu.cn
Academic Degrees
2001.06–2006.06 Stanford University Ph.D. in Physical Chemistry
2004.03–2005.09 Stanford University M.S. in Electrical Engineering
1996.09–2001.06 University of Science and Technology of China B.S. in Polymer Science and Engineering
Professional Experience
1. “Cross-scale atomic layer deposition manufacturing methodology for the stabilization of flexible quantum dots optoelectronic displays” Key project of the National Natural Science Foundation of China (51835005), Project leader.
2. “Atomic-level manufacturing and measurement”, Innovative Research Team Project of Natural Science Foundation of Hubei Province (2020CFA030), Project leader.
3. "Atomic-scale collaborative Manufacturing Methods for Integrated Circuits under 5nm", Science Exploration Award, Project leader.
4. "Research on atomic Scale Collaborative Manufacturing Methods", STAR Independent Innovation Research Fund of School of Mechanical Engineering, Project leader.
5. “Demonstration and application of the key technology for the coating of the elongated hole part via chemical vapor deposition - Driving theory of CVD thermal protection permeation layer on the surface of ultra-fine and ultra-long inner holes of high-temperature working alloy components”, National Key Research and development plan for manufacturing basic technology and key components, core member.
6. "Development and application of ALD coating technology for the cathode materials in lithium-ion material", Industry-university-research cooperation project with Ningde Times New Energy Technology Co., LTD., Project leader.
Selected Publications
1. Xiao Liu, Shuangfeng Jia, Ming Yang, Yuanting Tang, Yanwei Wen, Shengqi Chu, Jianbo Wang, Bin Shan*, Rong Chen*, “Activation of subnanometric Pt on Cu-modified CeO2 via redox-coupled atomic layer deposition for CO oxidation” Nature Comm. 2020, 11, 4240.
2. Jianfeng Wanyan, Kun Cao, Zhiping Chen, Yun Li, Chenxi Liu, Runqing Wu, Xiao-Dong Zhang*, Rong Chen* “Predictive tool for sensitive and expedited measurement of ultra-barrier permeation” Engineering 2021, 7 (10), 1461.
3. Yuanjie Cao, Yuanting Tang, Chaojun Huang, Zhili Wang, Feng Liu, Bin Shan, Rong Chen* “Vaporized-salt-induced sp3-hybridized Defects on Nitrogen-doped Carbon Surface towards Oxygen Reduction Reaction” Carbon 2021, 180, 1.
4. Yuanjie Cao, Haoyang Peng, Shengqi Chu, Yuanting Tang, Chaojun Huang, Zhili Wang, Feng Liu, Jinsong Wu, Bin Shan, Rong Chen* “Molten-salt-assisted Thermal Emitting Method to Transform Bulk Fe2O3 into Fe Single Atom Catalysts for Oxygen Reduction Reaction in Zn-air battery” Chem. Eng. J. 2021, 129713.
5. Zoushuang Li, Junren Xiang, Xiao Liu, Xiaobo Li, Lijie Li, Bin Shan, Rong Chen* “A combined multiscale modelling and experimental study on surface modification of high-volume micro-nanoparticles with atomic accuracy” Inter. J. Extreme Manufacturing 2022, 4, 025101.
6. Rong Chen*, Yicheng Li, Jiaming Cai, Kun Cao, Han-Bo-Ram Lee “Atomic Level Deposition to Extend Moore’s Law and Beyond” Inter. J. Extreme Manufacturing 2020, 2, 022002. (invited topic review)
7. Yun Li#, Di Wen#, Yinghao Zhang, Yuan Lin, Kun Cao, Fan Yang*, Rong Chen* “Highly-stable PEN as gas-barrier substrate for flexible displays via atomic layer infiltration” Dalton Trans. 2021, 50, 16166.
8. Zoushuang Li, Cao Kun*, Xiaobo Li, Rong Chen* “Computational fluid dynamics study on spatial atomic layer deposition for the conformality of microgroove substrates” Inter. J. Heat Mass Transfer 2021, 181, 121854.
9. Ming Zhao, Kun Cao, Mengjia Liu, Jing Zhang, Rong Chen*, Zhiguo Xia* “Dual-shelled RbLi(Li3SiO4)2:Eu2+@Al2O3@ODTMS phosphor as a stable green emitter for high-power LED Backlights” Angew. Chem. Int. Ed. 2020, 59, 2.
10. Binze Zhou, Mengjia Liu, Yanwei Wen, Yun Li, Rong Chen* “Atomic Layer Deposition for Quantum Dots based Devices” Opto-Electronic Advances 2020, 3, 190043. (invited review, cover)
11. Yun Li, Yingfei Xiong, Huizhi Yang, Kun Cao, Rong Chen*, “Thin film encapsulation for the organic light-emitting diodes via atomic layer deposition” J. Mater. Res. 2020, 35, 681. (invited review, cover)
12. Kun Cao, Jiaming Cai, Bin Shan, Rong Chen*, “Nanoparticles surface functionalization through atomic layer deposition” Sci. Bulletin 2020, 65, 678. (invited review)
13. Kun Cao, Jiaming Cai, Rong Chen* “Inherent selective atomic layer deposition and applications” Chem. Mater. 2020, 32, 2195. (invited perspective)
14. Wentao Cong, Zoushuang Li, Kun Cao, Guang Feng, Rong Chen* “Transient analysis and process optimization of the spatial atomic layer deposition using the dynamic mesh method” Chem. Eng. Sci. 2020, 217, 115513.
15. Xiao Liu, Jiaqiang Yang, Gurong Shen, Meiqing Shen, Yunkun Zhao, Kyeongjae Cho, Bin Shan* and Rong Chen*, “Tuning the structure of bifunctional Pt/SmMn2O5 interface for promoted low-temperature CO oxidation activity” Nanoscale, 2019, 11, 8150. (cover article)
16. Yanwei Wen, Jiaming Cai, Jie Zhang, Jiaqiang Yang, Lu Shi, Kun Cao, Rong Chen* and Bin Shan* “Edge selective growth of MCp2 (M=Fe, Co, Ni) precursors on Pt nanoparticles in atomic layer deposition: a combined theoretical and experimental study” Chem. Mater., 2019, 31, 101. (cover article)
17. Qinyong Xiang, Binze Zhou, Kun Cao*, Yanwei Wen, Yun Li, Zhaojie Wang, Chenchen Jiang, Bin Shan, Rong Chen* “Bottom up Stabilization of CsPbBr3 Quantum Dots-Silica Sphere with Selective Surface Passivation via Atomic Layer Deposition” Chem. Mater. 2018, 30(23): 8486
18. Rong Chen*, Kai Qu, Jiawei Li, Penghui Zhu, Chenglong Duan, Jing Zhang, Xiwen Li, Xiao Liu*, Zhijian Yang “Ultrathin Zirconia Passivation and Stabilization of Aluminum Nanoparticles for Energetic Nanomaterials via Atomic Layer Deposition” ACS Appl. Nano Mater., 2018, 1, 5500.
19. Kun Cao, Jiaming Cai, Xiao Liu, Rong Chen* “Catalysts design and synthesis via selective atomic layer deposition” J. Vac. Sci. Technol. A, 2018, 36, 010801. (Invited review)
20. Xiao Liu, Qian-Qian Zhu, Yun Lang, Kun Cao, Sheng-Qi Chu, Bin Shan*, Rong Chen* “Oxide nanotraps-anchored Pt nanoparticles with high activity and sintering resistance via area-selective atomic layer deposition” Angew. Chem. Int. Ed., 2017, 56, 1648.
21. Kun Cao, Lu Shi, Miao Gong, Jiaming Cai, Xiao Liu, Shengqi Chu, Bin Shan*, Rong Chen* “Nanofence Stabilized Platinum Nanoparticles Catalyst via Facet-Selective Atomic Layer Deposition” Small, 2017,1700648, .
22. Xiaolei Wang, Yun Li, Jilong Lin, Bin Shan, Rong Chen* “Modular injector integrated linear apparatus with motion profile optimization for spatial atomic layer deposition” Rev. Sci. Instrum., 2017, 88, 115108.
23. Bin Huang, Wenjuan Yang, Yanwei Wen, Bin Shan*, Rong Chen* “Co3O4 Modified TiO2 Nanotube Arrays via Atomic Layer Deposition for Improved Visible-Light Photoelectrochemical Performance” ACS Appl. Mater. Inter. 2015, 7 (1), 422
Awards and Honors
2021 2021 2021 2020 |
The Outstanding Project of National Disruptive Technology Innovation Competition Winner of the 3rd Science Exploration Award (Advanced Manufacturing) HUST “Advanced individuals in international exchanges and cooperation” HUST “Foreign Affairs award” |
2020 |
“Female science and technology innovation talents in Hubei Province” |
2019 |
National program of Leading scientific and technological talents |
2019 |
Annual major academic progress of HUST |
2019 |
HUST “Teacher's Professional Ethics award” |
2018 |
First Prize of Technical Inventions (Hubei 2018) |
2018 |
Special Gold Medal (with the congratulations of the jury) of 46th Salon International Inventions Geneva |
2017 |
The 12th China Ceramic Society Youth Science and Technology Award nomination Award |
2017 |
HUST 2016 intellectual property award |
2016 |
China Overseas innovation talents contribution award |
2016 |
Gold Medal of 44th Salon International Inventions Geneva and the special award for international invention by National search council of Thailand |
2016 2015 |
Two J. Vac. Sci. Technol. articles selected as monthly MOST READ ones Recipient of national science and technology innovation leading talents |
2015 |
Hubei Science Foundation for Distinguished Young Scholar |
2013 |
HUST 2013 Best Youth Award |
2009 |
New Century Excellent Talents by Chinese Education Ministry |
2008 |
Frost & Sullivan Innovation award for North American advanced massive storage technology |
2008 |
AlwaysOn Global 250 distinguished team |
2006 |
Semiconductor Research Corporation Simon Karecki Award for talented young researcher in the pursuit of innovations in environmental research |
Courses Taught
Undergraduate-Level Courses:
1. Introduction of Nanotechnology
2. Nanotechnology in Daily Life
Graduate-Level course:
1. Thin Film Technology
2. Advanced Manufacturing Engineering
Centers/Programs
1. “Cross-scale atomic layer deposition manufacturing methodology for the stabilization of flexible quantum dots optoelectronic displays” Key project of the National Natural Science Foundation of China (51835005), Project leader.
2. “Atomic-level manufacturing and measurement”, Innovative Research Team Project of Natural Science Foundation of Hubei Province (2020CFA030), Project leader.
3. "Atomic-scale collaborative Manufacturing Methods for Integrated Circuits under 5nm", Science Exploration Award, Project leader.
4. "Research on atomic Scale Collaborative Manufacturing Methods", STAR Independent Innovation Research Fund of School of Mechanical Engineering, Project leader.
5. “Demonstration and application of the key technology for the coating of the elongated hole part via chemical vapor deposition - Driving theory of CVD thermal protection permeation layer on the surface of ultra-fine and ultra-long inner holes of high-temperature working alloy components”, National Key Research and development plan for manufacturing basic technology and key components, core member.
6. "Development and application of ALD coating technology for the cathode materials in lithium-ion material", Industry-university-research cooperation project with Ningde Times New Energy Technology Co., LTD., Project leader.
completed：
1. “Design and synthesis of nanocatalysts via selective atomic layer deposition for high efficient water-gas shift reaction” International (regional) cooperation and exchange project of National Natural Science Foundation of China (51911540476), Project leader.
2. “Fundamental study on spatially-separated atomic layer deposition system for flexible electronics”, General project of the National Natural Science Foundation of China (51575217), Project leader.
3. “Rational Design and Property Tuning of High Efficient Metal-Oxide Compound Catalyst”, 973 Youth Scientist Projects under Major National Scientific Research Program of China (2013CB934800), The chief scientist.
4. “Research of the core technology and equipment for the coating of micro-nano particles via atomic layer deposition”, Outstanding Youth foundation of Natural Science foundation of Hubei Province (2015CFA034), Project leader.
5. “Cultivation of the high-value patent portfolio for the equipment and processes of atomic layer deposition”, The 1st Construction projects of the cultivation of high-value patent portfolio of Intellectual property operation service system of Wuhan city. (20201G06), Project leader.
6. “Study of key technology for the reduction of noble metals via atomic layer deposition”，Industry-university-research with Weifu Group, Project leader.
7. “Growth of the nano catalyst particles with controllable components and size via atomic layer deposition”, Youth foundation project of National Natural Science Foundation of China (51101064), Project leader.
8. “Development of thin film encapsulation techniques via atomic layer deposition”, Industry-university-research cooperation project with Wuhan China Star Optoelectronics Corporations, Ltd. Project leader.
9. “Investigation into the Key Problems on Cross-scale Manufacturing of Flexible Quantum Dots Opto-electronic Devices of High Stability” (2016YXZD065), Key project of the independent innovation research foundation of HUST, Project leader.
