Li Xiaoping

Professor

Phone:

Email: lixiaoping@hust.edu.cn

Academic Areas: robotics and equipment automation

LI Xiaoping received his master degree from Huazhong University of Science and Technology (HUST), Wuhan, China, in 1992. He works at HUST since 1996 and has been a Professor since 2008, and received his phD. from HUST in 2010. From 2002 to 2012, he worked as vice-CTO at Shanghai micro electronics equipment Co. In 2013, he found Team GET of HUST which focus on combination of student education, technology research and student entrepreneurship. His research interests include robotics and equipment automation.

Academic Degrees

September, 1983- June, 1987 Nanjing Institute of Technology Bachelor

September, 1989- June, 1992 Huazhong University of Science & Technology Master

September, 1989-June, 2010 Huazhong University of Science & Technology PhD.

Selected Publications

1）Li Xiaoping, Chen Feibiao. Measurement model of focusing and leveling measurement system for projection lithography tool. Acta Optica Sinica, 2007, 27（11）: 1987-1991

2）Li Xiaoping, Chen Feibiao, Li Zhidan. Simulation on signal processing of focusing and leveling measurement system. The 3rd SPIE International Symposium on Advanced Optical Manufacturing and Testing Technology, 2007, 6724:67241R.1-67241R.9

3）Li Xiaoping，Nie Hongfei，Yu bin. Non-linear PI-control temperature control algorithm for projection lens. The 3rd SPIE International Symposium on Advanced Optical Manufacturing and Testing Technology, 2007, 6724:67241Q.1-67241Q.9

4）Li Xiaoping, Li Zhike, Chen Xuedong. Identification Method for Transfer Function of Multi-DOFs Motion Stage. 11th International Conference on Electrical Machines and System, 2008: 2188-2191

5）Li Xiaoping, Li Zhike, Chen Xuedong. Calibration method for motor servo parameters of nano-precision motion stage. Proceedings of the CSEE, 2009, 29(21):87-92

6）Liao Feihong, Li Xiaoping, Chen Xuedong. Probe spot position error on the accuracy of focusing and leveling measurement system. Acta Optica Sinica, 2010, 30（4）:1041-1045

7Liao Feihong, Li Xiaoping, Jiang Wei. Effects of air flow disturbance of spool valve on vibration control of active pneumatic vibration isolation system. 2011 International Conference on Digital Manufacturing & Automation (ICDMA 2011). Aug.5 - Aug.7, 2011, Zhangjiajie. China.

8）F. H. Liao, X. P. Li, Z. Y. Yuan. Self-tuning of Hybrid Position and Velocity Feedback of 6-DOF Vibration Isolation System. Mechanika. 2011, 17(6): 630-636.

9）Liao Feihong, Li Xiaoping, Chen Xuedong. Developments and prospects of active vibration isolator for precision equipment. Mechanical Science and Technology, 2012, 31(9):1411-1419

10）Li Xiaoping, Liao Feihong, Chen Xuedong. Optimization design for structure parameters of active vibration isolator. Journal of Vibration Engineering, 2013, 26(1):61-67.

11）Lei Min, Li Xiaoping, Miao Huaikun. Development of contamination control techniques for EUV optics. Laser & Optoelectronics Progress, 50(3): 53-58.