Chen Rong


Phone: 86-27-87558744


Academic Areas: micro-nano technology, Atomic Layer Deposition, nanocomposite catalysis, flexible electronics

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Prof. Rong CHEN is a professor of mechanical engineering from Huazhong University of Science and Technology (HUST), China. She is the deputy director of HUST flexible electronic research center, assistant dean for School of Mechanical Science and Engineering at HUST. She is also the Courtesy professor of School of optics and electronic information at HUST, and the Courtesy professor of Ningbo Institute of Industrial Technology of the Chinese Academy of Sciences (CAS).

Prof. Chen obtained her bachelor degree from University of Science and Technology of China (USTC) in 2001 and her Master and PhD degrees from Stanford University in 2006. Before she joined HUST as a full professor in 2011, she was a senior research scientist in Intel Labs and Applied Materials, Inc., Santa Clara, performing research and development in VLSI process and related equipment development.

Prof Chen’s research focuses on atomic level manufacturing, by understanding surface science, and applying this knowledge to a range of problems in sustainable energy, semiconductor processing, and nanotechnology. Her current research interests include selective atomic layer deposition method, nanoparticles modification, thin film technology for applications in catalysis, optoelectronics, and energy storage, as well as developing ALD apparatus for these emerging applications. Prof Chen is the PI for the key project of national natural science foundation of China, National Basic Research Program of China (973), Innovation team leader of Hubei Province, etc.

Prof. Chen has authored and co-authored over hundred publications on Nat. Comm., Adv Mater, Angew. Chem. Int. Ed, Small, Sci. Bullet., IJEMOEA, etc. She has over 50 authorized patents (including 9 international patents) and authored 2 books and 2 chapters. She has given dozens of invited presentations, lectures and tutorials at international conferences such as IEEE Nano, AVS-ALD. She has served as a committee member of AVS ALD conference and chairs of several conferences (including the 5th International Conference on ALD Applications and 1st Asian ALD Meeting). She is the member of European Union HERALD and Asian ALD organization. Prof. Chen is the editor of Elsevier Physica B: condensed matter, the member of editorial committee of Engineering and NPG Scientific reports. She is IEEE senior member, and the member of AVS, ECS, ACS, etc.

Prof. Chen is also the recipient of many national prestigious awards from Chinese Ministry of science and technology, Ministry of Education, etc. She is also the recipient of the Simon Karecki award of Semiconductor Research Association, the Texas Instruments Woman’s Fellowship for Leadership in Microelectronics, China Overseas innovation talents contribution award, Geneva international innovation exhibition Special Gold awardsThe first prize of Technological invention of Hubei ProvinceIntellectual Property Award of Hubei Province, etc.


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Academic Degrees

2001.06–2006.06    Stanford University Ph.D. in Physical Chemistry

2004.03–2005.09    Stanford University M.S. in Electrical Engineering

1996.09–2001.06    University of Science and Technology of China B.S. in Polymer Science and Engineering

Professional Experience

2011.08--present   Professor, School of mechanical science and engineering, School of optical and electronic information by courtesy, Huazhong University of Science and Technology

2012.05--present    Adjunct professor, Ningbo Institute of materials technology and engineering, Chinese Academy of Sciences

2015.07--present    Associate director, HUST flexible electronics research center      

2007.07--2011.08    senior research scientist, Intel Labs

2009.11--2011.08    In-house scientific advisor, Intel external research office

2006.07--2007.07    senior process engineer, Applied materials, Inc


Selected Publications

1.  Xiao Liu, Shuangfeng Jia, Ming Yang, Yuanting Tang, Yanwei Wen, Shengqi Chu, Jianbo Wang, Bin Shan*, Rong Chen*, “Activation of subnanometric Pt on Cu-modified CeO2 via redox-coupled atomic layer deposition for CO oxidation” Nature Comm. 2020, 11, 4240.  

2. Rong Chen*, Yicheng Li, Jiaming Cai, Kun Cao, Han-Bo-Ram Lee “Atomic Level Deposition to Extend Moore’s Law and Beyond” Inter. J. Extreme Manufacturing 2020, 2, 022002. (invited topic review)

3. Kun Cao, Jiaming Cai, Rong Chen* “Inherent selective atomic layer deposition and applications” Chem. Mater. 2020, 32, 2195. (invited perspective)

4. Kun Cao, Jiaming Cai, Bin Shan, Rong Chen*, “Nanoparticles surface functionalization through atomic layer deposition” Sci. Bulletin 2020, 65, 678. (invited review)

5. Yun Li, Yingfei Xiong, Huizhi Yang, Kun Cao, Rong Chen*, “Thin film encapsulation for the organic light-emitting diodes via atomic layer deposition” J. Mater. Res. 2020, 35, 681. (invited review, cover)

6. Binze Zhou, Mengjia Liu, Yanwei Wen, Yun Li, Rong Chen* “Atomic Layer Deposition for Quantum Dots based Devices” Opto-Electronic Advances 2020, 3, 190043. (invited review, cover)

7. Ming Zhao, Kun Cao, Mengjia Liu, Jing Zhang, Rong Chen*, Zhiguo Xia* “Dual-shelled RbLi(Li3SiO4)2:Eu2+@Al2O3@ODTMS phosphor as a stable green emitter for high-power LED Backlights” Angew. Chem. Int. Ed. 2020, 59, 2.

8. Wentao Cong, Zoushuang Li, Kun Cao, Guang Feng, Rong Chen* “Transient analysis and process optimization of the spatial atomic layer deposition using the dynamic mesh method” Chem. Eng. Sci. 2020, 217, 115513.

9. Xiao Liu, Jiaqiang Yang, Gurong Shen, Meiqing Shen, Yunkun Zhao, Kyeongjae Cho, Bin Shan* and Rong Chen*, “Tuning the structure of bifunctional Pt/SmMn2O5 interface for promoted low-temperature CO oxidation activity” Nanoscale, 2019, 11, 8150. (cover article)

10. Yanwei Wen, Jiaming Cai, Jie Zhang, Jiaqiang Yang, Lu Shi, Kun Cao, Rong Chen* and Bin Shan* “Edge selective growth of MCp2 (M=Fe, Co, Ni) precursors on Pt nanoparticles in atomic layer deposition: a combined theoretical and experimental study” Chem. Mater., 2019, 31, 101. (cover article)

11. Xiao Liu, Qian-Qian Zhu, Yun Lang, Kun Cao, Sheng-Qi Chu, Bin Shan*, Rong Chen* “Oxide nanotraps-anchored Pt nanoparticles with high activity and sintering resistance via area-selective atomic layer deposition” Angew. Chem. Int. Ed., 2017, 56, 1648.

12. Kun Cao, Lu Shi, Miao Gong, Jiaming Cai, Xiao Liu, Shengqi Chu, Bin Shan*, Rong Chen* “Nanofence Stabilized Platinum Nanoparticles Catalyst via Facet-Selective Atomic Layer Deposition” Small, 1700648, 2017.

13. Qinyong Xiang, Binze Zhou, Kun Cao*, Yanwei Wen, Yun Li, Zhaojie Wang, Chenchen Jiang, Bin Shan, Rong Chen* “Bottom up Stabilization of CsPbBr3 Quantum Dots-Silica Sphere with Selective Surface Passivation via Atomic Layer Deposition” Chem. Mater. 2018, 30(23): 8486.

14. Rong Chen*, Kai Qu, Jiawei Li, Penghui Zhu, Chenglong Duan, Jing Zhang, Xiwen Li, Xiao Liu*, Zhijian Yang “Ultrathin Zirconia Passivation and Stabilization of Aluminum Nanoparticles for Energetic Nanomaterials via Atomic Layer Deposition” ACS Appl. Nano Mater., 2018, 1, 5500.

15. Kun Cao, Jiaming Cai, Xiao Liu, Rong Chen* “Catalysts design and synthesis via selective atomic layer deposition” J. Vac. Sci. Technol. A 2018, 36, 010801. (Invited review)

16. Xiaolei Wang, Yun Li, Jilong Lin, Bin Shan, Rong Chen* “Modular injector integrated linear apparatus with motion profile optimization for spatial atomic layer deposition” Rev. Sci. Instrum., 2017, 88, 115108.

17. Rong Chen*, Ji-Long Lin, Wen-Jie He, Chen-Long Duan, Qi Peng, Xiao-Lei Wang, Bin Shan “Spatial atomic layer deposition of ZnO/TiO2 nano-laminates” J. Vac. Sci. Technol. A., 2016, 34, 051502.

18. Wen-Jie He, Hai-Tao Zhang, Zhi-Yong Chen, Ji-Long Lin, Kan Tian, Bin Shan, Rong Chen* “Temperature Control for Nano-Scale Films by Spatially-Separated Atomic Layer Deposition based on Generalized Predictive Control” IEEE Trans. Nanotechnol, 2015, 14(6), 1094.

19. Wen-jie He, Hai-tao Zhang*, Zhiyong Chen, Bo Chu, Kun Cao, Bin Shan, Rong Chen* “Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor” IEEE Trans. Contr. Sys. Tech., 2015, 23(6), 2408.

20. Chen-Long Duan, Xiao Liu, Bin Shan, Rong Chen* “Fluidized bed coupled rotary reactor for nanoparticles coating via atomic layer deposition” Rev. Sci. Instrum., 2015, 86, 075101.

Awards and Honors


HUST “Foreign Affairs award


“Female science and technology innovation talents in Hubei Province”


National program of Leading scientific and technological talents


Annual major academic progress of HUST


HUST “Teacher's Professional Ethics award”


First Prize of Technical Inventions (Hubei 2018)


Special Gold Medal (with the congratulations of the jury) of 46th Salon International Inventions Geneva


The 12th China Ceramic Society Youth Science and Technology Award nomination Award


HUST 2016 intellectual property award


China Overseas innovation talents contribution award


Gold Medal of 44th Salon International Inventions Geneva and the special award for international invention by National search council of Thailand



Two J. Vac. Sci. Technol. articles selected as monthly MOST READ ones

Recipient of national science and technology innovation leading talents


Hubei Science Foundation for Distinguished Young Scholar


HUST 2013 Best Youth Award


New Century Excellent Talents by Chinese Education Ministry


Frost & Sullivan Innovation award for North American advanced massive storage technology


AlwaysOn Global 250 distinguished team


Semiconductor Research Corporation Simon Karecki Award for talented young researcher in the pursuit of innovations in environmental research


Courses Taught

Undergraduate-Level Courses:

     1. Introduction of Nanotechnology

     2. Nanotechnology in Daily Life

Graduate-Level course:

    1. Thin Film Technology

    2. Advanced Manufacturing Engineering



1.  “Cross-scale atomic layer deposition manufacturing methodology for the stabilization of flexible quantum dots optoelectronic displays” Key project of the National Natural Science Foundation of China (51835005), Project leader.

2. “Design and synthesis of nanocatalysts via selective atomic layer deposition for high efficient water-gas shift reaction” International (regional) cooperation and exchange project of National Natural Science Foundation of China (51911540476), Project leader.

3. “Atomic-level manufacturing and measurement”, Innovative Research Team Project of Natural Science Foundation of Hubei Province (2020CFA030), Project leader.

4. “Research of the encapsulation methodology for the quantum dots films”, Application-based Frontier project of Wuhan City, Project leader.

4. “Research of the encapsulation methodology for the quantum dots films”, Application-based Frontier project of Wuhan City, Project leader.

5. “Development of magnetic-optical materials for integrated on-chip silicon waveguide insolators”Industry-university-research cooperation project with Huawei (YBN2019105148), Project leader

6. “Cultivation of the high-value patent portfolio for the equipment and processes of atomic layer deposition”, The 1st Construction projects of the cultivation of high-value patent portfolio of Intellectual property operation service system of Wuhan city. (20201G06), Project leader.

7. “The theory and method for the rapid atomic layer deposition on the surfaces of the 3-D irregular structures” (2019kfyXMBZ025), Key project of the independent innovation research foundation of HUST, Project leader.

8. “Development of the principle and equipment high sensitive water-oxygen permeation detection based on differential pressure mass spectrometry”Key project of the State key laboratory of digital manufacturing equipment and technology (0225100102), Project leader.

9. “Study of key technology for the reduction of noble metals via atomic layer deposition”Industry-university-research with Weifu Group, Project leader.

10. “Demonstration and application of the key technology for the coating of the elongated hole part via chemical vapor deposition - Driving theory of CVD thermal protection permeation layer on the surface of ultra-fine and ultra-long inner holes of high-temperature working alloy components”, National Key Research and development plan for manufacturing basic technology and key components, core member.


1. “Rational Design and Property Tuning of High Efficient Metal-Oxide Compound Catalyst”, 973 Youth Scientist Projects under Major National Scientific Research Program of China (2013CB934800), The chief scientist.

2. “Fundamental study on spatially-separated atomic layer deposition system for flexible electronics”, General project of the National Natural Science Foundation of China (51575217), Project leader.

3. “Research of the core technology and equipment for the coating of micro-nano particles via atomic layer deposition”, Outstanding Youth foundation of Natural Science foundation of Hubei Province (2015CFA034), Project leader.

4. “Growth of the nano catalyst particles with controllable components and size via atomic layer deposition”, Youth foundation project of National Natural Science Foundation of China (51101064), Project leader.

5. “Development of thin film encapsulation techniques via atomic layer deposition”, Industry-university-research cooperation project with Wuhan China Star Optoelectronics Corporations, Ltd. Project leader.

6. “Investigation into the Key Problems on Cross-scale Manufacturing of Flexible Quantum Dots Opto-electronic Devices of High Stability” (2016YXZD065), Key project of the independent innovation research foundation of HUST, Project leader.

7. “Research of the atomic-level modification of the multi-interfaces catalyst via atomic layer deposition”, Key project of the State key laboratory of digital manufacturing equipment and technology (0225100063), Project leader.

8. “High-efficiency coating of the micro-nano particles via atomic layer deposition”, The frontier research project of the independent innovation research foundation of HUST, (2014TS037), Project leader.

9. “Research of the mechanism and design of the atmospheric-pressure atomic layer deposition system”, The frontier research project of the independent innovation research foundation of HUST, (2012TS076), Project leader.

10. “Theoretical and experimental research of the growth of nanoparticles via atomic layer deposition”, Key project of the State key laboratory of digital manufacturing equipment and technology (0225100053), Project leader.