Chen Rong


Phone: 86-27-87558744


Academic Areas: micro-nano technology, Atomic Layer Deposition, nanocomposite catalysis, flexible electronics

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Prof. Rong CHEN is a professor of mechanical engineering from Huazhong University of Science and Technology (HUST), China. She is the deputy director of HUST flexible electronic research center, assistant dean for School of Mechanical Science and Engineering at HUST. She is also the Courtesy professor of School of optics and electronic information at HUST, and the Courtesy professor of Ningbo Institute of Industrial Technology of the Chinese Academy of Sciences (CAS).

Prof. Chen obtained her bachelor degree from University of Science and Technology of China (USTC) in 2001 and her Master and PhD degrees from Stanford University in 2006. Before she joined HUST as a full professor in 2011, she was a senior research scientist in Intel Labs and Applied Materials, Inc., Santa Clara, performing research and development in VLSI process and related equipment development. Prof Chen’s research focuses on understanding surface science, and applying this knowledge to a range of problems in sustainable energy, semiconductor processing, and nanotechnology. Her current research interests include selective atomic layer deposition for applications in catalysis, optoelectronics, and energy storage, as well as developing ALD apparatus for these emerging applications.

Prof. Chen has authored and co-authored over 80 publications and over 30 patents. She is regularly invited to speak at international conferences. She is the program committee member of the AVS ALD international conference and the member of European Union HERALD and Asian ALD organization. Prof. Chen is also the recipient of many national prestigious awards from Chinese Ministry of science and technology, Ministry of Education, etc. She is also the recipient of the Simon Karecki award of Semiconductor Research Association, the Texas Instruments Woman’s Fellowship for Leadership in Microelectronics, China Overseas innovation talents contribution award, Geneva international innovation exhibition Special Gold awards.


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Academic Degrees

2001.06–2006.06    Stanford University Ph.D. in Physical Chemistry

2004.03–2005.09    Stanford University M.S. in Electrical Engineering

1996.09–2001.06    University of Science and Technology of China B.S. in Polymer Science and Engineering

Professional Experience

2011.08--present   Professor, School of mechanical science and engineering, School of optical and electronic information by courtesy, Huazhong University of Science and Technology

2012.05--present    Adjunct professor, Ningbo Institute of materials technology and engineering, Chinese Academy of Sciences

2015.07--present    Associate director, HUST flexible electronics research center      

2007.07--2011.08    senior research scientist, Intel Labs

2009.11--2011.08    In-house scientific advisor, Intel external research office

2006.07--2007.07    senior process engineer, Applied materials, Inc


Selected Publications

  1. Xiao Liu, Qian-Qian Zhu, Yun Lang, Kun Cao, Sheng-Qi Chu, Bin Shan*, Rong Chen* “Oxide nanotraps-anchored Pt nanoparticles with high activity and sintering resistance via area-selective atomic layer deposition” Angew. Chem. Int. Ed. 2017, 56, 1648.

  2. Kun Cao, Lu Shi, Miao Gong, Jiaming Cai, Xiao Liu, Shengqi Chu, Bin Shan*, Rong Chen* “Nanofence Stabilized Platinum Nanoparticles Catalyst via Facet-Selective Atomic Layer Deposition” Small, 1700648, 2017.

  3. Qinyong Xiang, Binze Zhou, Kun Cao*, Yanwei Wen, Yun Li, Zhaojie Wang, Chenchen Jiang, Bin Shan, Rong Chen* “Bottom up Stabilization of CsPbBr3 Quantum Dots-Silica Sphere with Selective Surface Passivation via Atomic Layer Deposition” Chem. Mater. 2018, DOI: 10.1021/acs.chemmater.8b03096.

  4. Xiao Liu, Yuanting Tang, Meiqing Shen, Wei Li, Shengqi Chu, Bin Shan*, Rong Chen* “Bifunctional CO oxidation over Mn-mullite anchored Pt subnanoclusters via atomic layer deposition” Chem. Sci. 2018, 9, 2469.

  5. Rong Chen*, Kai Qu, Jiawei Li, Penghui Zhu, Chenglong Duan, Jing Zhang, Xiwen Li, Xiao Liu*, Zhijian Yang “Ultrathin Zirconia Passivation and Stabilization of Aluminum Nanoparticles for Energetic Nanomaterials via Atomic Layer Deposition” ACS Appl. Nano Mater. 2018, 1, 5500.

  6. Jiaming Cai, Jie Zhang, Kun Cao,* Miao Gong, Yun Lang, Xiao Liu, Shengqi Chu, Bin Shan, Rong Chen* “Selective Passivation of Pt Nanoparticles with Enhanced Sintering Resistance and Activity toward CO Oxidation via Atomic Layer Deposition” ACS Appl. Nano Mater. 2018, 1, 552.

  7. Kun Cao, Jiaming Cai, Xiao Liu, Rong Chen* “Catalysts design and synthesis via selective atomic layer deposition” J. Vac. Sci. Technol. A (Invited review) 2018, 36, 010801.

  8. Xiaolei Wang, Yun Li, Jilong Lin, Bin Shan, Rong Chen* “Modular injector integrated linear apparatus with motion profile optimization for spatial atomic layer deposition” Rev. Sci. Instrum. 2017, 88, 115108.

  9. Rong Chen*, Ji-Long Lin, Wen-Jie He, Chen-Long Duan, Qi Peng, Xiao-Lei Wang, Bin Shan “Spatial atomic layer deposition of ZnO/TiO2 nano-laminates” J. Vac. Sci. Technol. A., 2016, 34, 051502.

  10. Wen-Jie He, Hai-Tao Zhang, Zhi-Yong Chen, Ji-Long Lin, Kan Tian, Bin Shan, Rong Chen* “Temperature Control for Nano-Scale Films by Spatially-Separated Atomic Layer Deposition based on Generalized Predictive Control” IEEE Trans. Nanotechnol, 2015, 14(6), 1094.

  11. Wen-jie He, Hai-tao Zhang*, Zhiyong Chen, Bo Chu, Kun Cao, Bin Shan, Rong Chen* “Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor” IEEE Trans. Contr. Sys. Tech. 2015, 23(6), 2408.

  12. Chen-Long Duan, Xiao Liu, Bin Shan, Rong Chen* “Fluidized bed coupled rotary reactor for nanoparticles coating via atomic layer deposition” Rev. Sci. Instrum., 2015, 86, 075101.

  13. Kun Cao, Qian-Qian Zhu, Bin Shan*, Rong Chen* “Controlled Synthesis of Pd/Pt Core Shell Nanoparticles Using Area-selective Atomic Layer Deposition” Sci. Rep., 2015, 5, 8470.

  14. Bin Huang, Wen-Juan Yang, Yan-Wei Wen, Bin Shan*, Rong Chen* “Co3O4 Modified TiO2 Nanotube Arrays via Atomic Layer Deposition for Improved Visible-Light Photoelectrochemical Performance” ACS Appl. Mater. Inter., 2015, 7 (1), 422.

  15. Rong Chen, Stacey F. Bent*, “Chemistry for positive pattern transfer by area-selective atomic layer deposition” Adv. Mater., 2006, 18, 1086.

Awards and Honors


First   Prize of Technical Inventions (Hubei 2018)


Special   Gold Medal (with the congratulations of the jury) of 46th Salon   International Inventions Geneva


The   12th China Ceramic Society Youth Science and Technology Award nomination   Award



HUST   2016 intellectual property award


China   Overseas innovation talents contribution award


Gold   Medal of 44th Salon International Inventions Geneva and the   special award for international invention by National search council of   Thailand



Two   J. Vac. Sci. Technol. articles selected as monthly MOST READ ones

Recipient   of national science and technology innovation leading talents


Nature   publishing group the top 100 cited Scientific Reports articles in 2015


Hubei   Science Foundation for Distinguished Young Scholar


HUST   2013 Best Youth Award


Distinguished   expert of Hubei Province


New   Century Excellent Talents by Chinese Education Ministry


Frost   & Sullivan Innovation award for North American advanced massive storage   technology


AlwaysOn   Global 250 distinguished team


Semiconductor   Research Corporation Simon Karecki Award for talented young researcher in the   pursuit of innovations in environmental research

Courses Taught

Undergraduate-Level Courses:

     1. Introduction of Nanotechnology

     2. Nanotechnology in Daily Life

Graduate-Level course:

    1. Thin Film Technology

    2. Advanced Manufacturing Engineering



1. Principle Investigator, Rational Design and Property Tuning of High Efficient Metal-Oxide Compound Catalyst, Project number: 2013CB934800, Youth Scientist Projects under Major National Scientific Research Program of China(973) , 2013-2017  

2. Project Principal, Optimization of Spatically-Separated Atomic Layer Deposition Conditions Applied on Flexible Electronic Manufacturing, Project number: 51575217, National Natural Science Fund of China

3. Project Principal, Investigation into the Key Technology of Atomic Layer Coating on Micro-nano Particles and Devices, Project number: 2015CFA034, Natural Science Fund for Distinguished Young Scholars of Hubei Province

4. Project Principal, Development of Thin-film Packaging Technoloy using ALD, Industry-University-Institue Cooperation with China Star Optoelectronics Technology

5. Project Principal, Investigation into the Key Problems on Cross-scale Manufacturing of Flexible Quantum Dots Opto-electronic Devices of High Stability, Project Number: 2016YXZD065, Key Project Supported by Innovation Research Fund of Huazhong University of Science and Technology

6. Research Mainstay, Micro-nano Manufacturing and Nano-scale Measurement Technology, Project Number: IRT13017, Development Plan for Innovation Team by Chinese Ministry of Education