Selected Publications
[1] Xu S, Zhang CW, Wei HQ, and Liu SY, A single-image method of aberration retrieval for imaging systems under partially coherent illumination, J. Opt. 16(7), 072001 ,2014.
[2] Chen XG, Zhang CW, Liu SY,，Accurate measurement of templates and imprinted grating structures using Mueller matrix ellipsometry, Acta Phys. Sin., 63(18): 180701, 2014.
[3] Chen XG, Zhang CW, Liu SY, Depolarization effects from nanoimprinted grating structures as measured by Mueller matrix polarimetry. APPLIED PHYSICS LETTERS, 103(15): 151605, 2013.
[4] Zhang CW, Liu SY, Shi TL, Tang ZR, Fitting-determined formulation of effective mediumapproximation for 3D trench structures in model-based infrared reflectrometry, JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A, 28(2): 263-271, 2011
[5] Zhang CW, Liu SY, Shi TL, Tang ZR, Improved model-based infrared reflectrometry for measuring deep trench structures, JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A, 26(11): 2327-2335, 2009
[6] Chen XG, Liu SY, Zhang CW, Jiang H, Improved measurement accuracy in optical scatterometry using correction-based library search. APPLIED OPTICS, 52(27): 6727-6734, 2013.
[7] Chen XG, Liu SY, Zhang CW, Jiang H, Measurement configuration optimization for accurate grating reconstruction by Mueller matrix polarimetry. JOURNAL OF MICRO/NANOLITTHGRAPHY, MEMS, AND MOEMS, 12(3): 033013, 2013.
[8] Chen XG, Liu SY, Zhang CW, Zhu JL, Improved measurement accuracy in optical scatterometry using fitting error interpolation based library search, MEASUREMET, 46(8): 2638-2646, 2013.
[9] Zhu JL, Liu SY, Zhang CW, Chen XG, Dong ZQ, Identification and reconstruction of diffraction structures in optical scatterometry using support vector machine method, JOURNAL OF MICRO/NANOLITHOGRAPHY, MEMS, AND MOEMS, 12(1): 013004, 2013
[10] Liu SY, Ma Y, Chen XG, Zhang CW, Estimation of the convergence order of rigorous coupled-wave analysis for binary gratings in optical critical dimension metrology, OPTICAL ENGINEERING, 51(8): 081504, 2012
[11] Liu W, Liu SY, Wu XF, Zhang CW, Parametric analytical model for off-axis illumination sources based on Sigmoid function, ACTA PHYSICA SINICA, 60(5): 054213, 2011
[12] Liu SY, Zhang CW, Shen HW, Gu HY, Model-based FTIR reflectometry measurement system for deep trench structures of DRAM, SPECTROSCOPY AND SPECTRAL ANALYSIS, 29(4): 935-939, 2009
[13] Liu SY, Gu HY, Zhang CW, Shen HW, A fast algorithm for reflectivity calculation of micro/nano deep trench structures by corrected effective medium approximation, ACTA PHYSICA SINICA, 57(9): 5996-6001, 2008
